Achievement of nanosized thin films of titania was achieved by radio-frequency sputtering of a Ti(97%)-Mo(3%) target. Deposition was performed under inert or reactive atmosphere followed by annealing at temperatures up to 800 degreesC. The resulting layers became more stoichiometric as annealing temperature increased. The small part of Mo proved useful to prevent exaggerated grain coalescence. Reactive sputtering was more effective than inert deposition to achieve a nanograined layer with lowest size (31 nm). Mo segregated at the surface and partially sublimated as MoO3. The layers became n-doped semiconductors and were tested as chemoresistive gas sensors. Good capability to sense ethanol was determined within a range useful for applications. A model was proposed to explain the response to ethanol. (C) 2002 American Vacuum Society.

Coalescence inhibition in nanosized titania films and related effects on chemoresistive properties towards ethanol

FERRONI, Matteo;SBERVEGLIERI, Giorgio;VOMIERO, Alberto;
2002

Abstract

Achievement of nanosized thin films of titania was achieved by radio-frequency sputtering of a Ti(97%)-Mo(3%) target. Deposition was performed under inert or reactive atmosphere followed by annealing at temperatures up to 800 degreesC. The resulting layers became more stoichiometric as annealing temperature increased. The small part of Mo proved useful to prevent exaggerated grain coalescence. Reactive sputtering was more effective than inert deposition to achieve a nanograined layer with lowest size (31 nm). Mo segregated at the surface and partially sublimated as MoO3. The layers became n-doped semiconductors and were tested as chemoresistive gas sensors. Good capability to sense ethanol was determined within a range useful for applications. A model was proposed to explain the response to ethanol. (C) 2002 American Vacuum Society.
File in questo prodotto:
File Dimensione Formato  
Coalescence inhibition in nanosized titania films and related effects on chemoresistive properties towards ethano.pdf

non disponibili

Dimensione 580.3 kB
Formato Adobe PDF
580.3 kB Adobe PDF   Visualizza/Apri

I documenti in ARCA sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/10278/3712403
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 21
  • ???jsp.display-item.citation.isi??? 18
social impact