Compositional evolution of Pd-based nanoclusters under thermal annealing in ion implanted SiO2

Sequential ion implantation has been used to synthesize Pd-based alloy nanoclusters in SiO2. Three systems have been investigated (PdCu, PdAg and PdFe) in terms of nanocluster formation and stability under thermal annealing. In particular, we focused on the role played by the annealing atmosphere. A comparison is made with similar alloy-based systems obtained by sequential ion implantation in silica of Au-Ag or Au-Cu followed by annealing under similar conditions. Strong similarities have been found in the compositional evolution of Pd-based and Au-based nanoclusters.